Hyperion Optical Coating System

Advanced optical coating solutions for complex coating challenges

Dynavac leverages nearly 40 years of expertise in optical coating technology in the Hyperion series. Hyperion optical coating systems handle some of today’s most sophisticated optical coatings, with a variety of chamber sizes, fixturing, deposition technologies, and process control options that can be configured for most any type of process requirement.

No matter how complex your coating challenge—anti-reflective, high reflectors, edge filters, polarizers, beam splitters—you can be confident in a proven platform with a reputation for producing precise and repeatable coatings run after run.

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Hyperion Optical Coating System Highlights

Typical coating uniformity is less than 2-3% (less than .5% achievable in some configurations)
Standard chamber sizes from 760mm–3m; larger chambers built to order
Evaporation, sputtering, and ion-assisted process technologies
Standard and custom-engineered fixtures
Clear, intuitive control interface
Advanced optical monitoring solutions

Hyperion Applications

Bandpass filters
Astronomical filters
Anti-reflection optics
Electronics
Laser optics

Hyperion features and system configurations

Deposition sources Vacuum chambers Pumping systems Substrate fixturing Pre-deposition treatments Layer thickness control Control systems

Deposition sources:

Single or Multi-pocket electron beam sources
High current thermal evaporation sources
Magnetron cathode – DC, pulsed DC and RF

Ion sources:

End-Hall ion source with hollow-cathode neutralizer
RF ion source with hollow-cathode neutralizer

The Hyperion platform offers the following range of standard-sized chambers:

760mm
900mm
1100mm
1200mm
1300mm
1500mm
1800mm

Chamber highlights

Box or split-cylinder designs
Exterior traced with water cooling channels
Two sets of stainless-steel wall liners

If you have a custom size or shape requirement, we can create a chamber that meets your specific needs. Contact us for more information.

Hyperion is available with a variety of pumping options to meet specific process requirements.

Roughing systems using oil-sealed or dry mechanical pumps
Cryogenic, turbomolecular or diffusion pumps for high-vacuum pumping
Removable evaporation baffle for easy cleaning
Meissner coil option with liquid nitrogen or closed-cycle cryogenerator

The Hyperion platform offers the following options to rotate the substrate:

Substrate tooling: single rotation

Flat calotte
Segmented fixture
Domed fixture
Flipping mechanism

Substrate tooling: planetary mechanism

Multi-planet, dual rotation configurations
Custom-engineered tooling

Loading carts/systems available for large optics

Substrate heating system

Front-side quartz heating system
Back-side Calrod heating system
Custom solutions available for heating beyond 300^oC

Glow-discharge cleaning system
Ion Source for substrate cleaning

The Hyperion system offers state-of-the-art layer thickness control to ensure process flexibility, precision and reliability run after run. The following are available:

Physical: Quartz Crystal Control
Optical: Spectrum-Pro Optical Monitoring System

The Hyperion product line includes a Dynavac-designed control system that can be customized for your unique requirements.

Features

Industrial programmable logic controller for high reliability
Menu-driven graphical interface via LabVIEW software
Data logging with user-selected variables
Download capability from standard thin film design programs
Remote diagnostic capability

Resources

Optics

Optical Coating Systems

In facilities around the world, you will find Dynavac systems in operation, handling some of the most sophisticated optical coating challenges. That means you can be confident in the performance of your Dynavac system, and the backing of a company that can meet your needs now and in the future.

Optics

Dynavac Delivers Large Optical Coating System to U of Rochester/LLE

Dynavac recently delivered a 74” Hyperion Optical Coating System to the University of Rochester’s Laboratory for Laser Energetics (LLE), a national resource for high energy physics.