Dynavac designs and builds PVD and PE-CVD systems for many applications and markets. We work closely with you to choose the thin film deposition components—from chambers through to control systems—that together meet your most demanding coating needs.
Components
Quality thin film deposition components, carefully integrated into application-specific systems
PVD deposition sources
Large-area systems for flat or multi-dimensional substrates. Our deposition sources and power supplies are selected for optimal film smoothness, density, and adhesion.
Sputtered films
- RF, AC, and DC power
- Planar and rotary magnetron sources
- Reactive processes for oxides, nitrides, etc.
PVD sources
- High current thermal sources
- Electron beam evaporation
Ion sources
- End-Hall ion source
- RF ion source with hollow cathode neutralizer
Control systems
Our thin film deposition systems include Dynavac-designed control systems customized for your unique requirements.
- Industrial programmable logic controller for high reliability
- Menu-driven graphical interface via LabVIEW software
- Data logging with user-selected variables
- Download capability from standard thin film design programs
- Remote diagnostic capability
Vacuum chambers
Our chambers are available in many configurations for batch and in-line coating:
- Cylindrical or rectangular
- Load locks
- Integrated material handling
Optical monitoring
Dynavac’s Spectrum Pro Optical Monitoring System ensures process precision and reliability run after run. The system measures and adjusts deposition layer thickness via single wavelength or broadband monitoring giving an unparalleled level of control and automation for your precision optical coatings
Dynavac’s Spectrum-Pro Broadband system allows the user to analyze and measure data across the entire spectrum of light. It builds upon the Single Wave Monitor platform, adding intelligent film analysis and in situ re-optimization. Wide-band measurements of coatings are obtained in real-time during deposition with a variety of high-speed spectrometers. Measurements are compared with coating models and adjusted in real-time to achieve coating performance targets.
Resources
Thin Film
Dynavac Pioneers Water-Cooled Planetary Mechanism for Customer’s Thin-Film Deposition System
Dynavac, a leading supplier of thin film deposition and space simulation systems, is pleased to announce the development of a novel, water-cooled planetary mechanism for thin-film deposition applications. This innovative new design, purpose-built for a Dynavac customer, further broadens the company’s diverse range of substrate rotation systems.
Optics
Spectrum-Pro Broadband Optical Monitor
The Dynavac Spectrum-Pro Broadband Optical Monitor is a fully integrated hardware and software product that provides a new level of control for the production of thin films.
Optics
Spectrum-Pro Optical Monitoring System
The Spectrum-Pro combines the strengths of a precision optical photometer and quartz crystal monitor to provide a new level of precision in end-point detection of optical coatings.