1. Thin Film Deposition Systems
  3. Systems
  5. PVD Deposition Systems

PVD Deposition Systems

High-performance, high-reliability batch PVD systems for thin film deposition

Dynavac designs and builds batch PVD systems for a wide variety of applications. Our systems can deposit metal films such as aluminum, silver, molybdenum, and chromium on glass, metal, plastic, or foils.

Additionally, we sputter a wide range of semiconductor materials and dielectrics including transparent conductive oxides. Dynavac optimizes all aspects of the system to ensure that sputtered films are smooth, dense, and adherent. And after nearly 40 years in the business, we’re here to stay with customer service second to none.

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Full range of deposition processes supported—sputtering through thermal evaporation

Each Dynavac thin film system is built for superior performance- from small batch and R&D coating systems to large-area systems with flat or multi-dimensional substrates. Our deposition sources and power supplies are selected for optimal film smoothness, density, and adhesion.

Sputtered films

  • RF, AC, and DC power
  • Planar and rotary magnetron sources
  • Reactive processes for oxides, nitrides, etc.

PVD sources

  • High current thermal sources
  • Electron beam evaporation

Ion sources

  • End-Hall ion source
  • RF ion source with hollow cathode neutralizer

Dynavac batch PVD system highlights

Deposition processesChamberPumping systemsSubstrate fixturesPre-deposition treatmentsLayer thickness controlControl systems
  • Magnetron cathode (DC, pulsed DC and RF)
  • High current thermal
  • Single and multi-pocket e-beam
  • End-hall ion source
  • RF ion source with hollow cathode neutralizer
  • RF, AC, and DC power
  • Planetary and rotary magnetron sources
  • Reactive processes for oxides, nitrides, etc.

Dynavac batch PVD applications include

Resources

Lighting

A Solution That Streamlined Production and Increased Profitability

An industrial lighting company needed to increase throughput and profitability of their reflector production line to meet production demands. Their existing manufacturing method involved a three-step deposition process using individual work centers. With a 17-hour/batch production cycle, the method was inefficient and had very high operating costs.

Thin Film

Product Spotlight - Dynavac Confocal Sputtering System

We recently delivered a confocal sputtering system to a valued client. Check out these highlights.

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