Batch DLC Coating Systems

Diamond Like Carbon (DLC) coating systems for extreme applications

Amorphous diamond-like carbon (DLC) coatings possess a unique combination of physical, mechanical, and chemical properties that make them an ideal choice for demanding optical applications. The Dynavac DLC Coating Series gives you reliable production of high-performance coatings that stand up to extreme environments.

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Precise, reliable Plasma Enhanced Chemical Vapor Deposition (PECVD)

The Dynavac DLC Coating Series provides precise, reliable Plasma Enhanced Chemical Vapor Deposition (PECVD) systems for a host of commercial and military applications, from barcode scanner windows and medical instrumentation to infrared scopes. Our DLC deposition systems produce smooth, ultra-resilient films that offer unparalleled protection against wear, abrasion, and impact coupled with outstanding chemical resistance.

Dynavac DLC series highlights

24-inch diameter chamber allows for flexibility in substrate sizes
PECVD process using 13.56 MHz excitation and auto-tuning network
DLC films with unparalleled protection against wear, abrasion, and environmental conditions
Deposition occurs at a constant rate set by plasma parameters with film thickness controlled by deposition time
Automatic process with easy-to-use recipes

Features & system configurations

DLC Film Properties & Compliance Vacuum Chamber Process Control User Interface Utilities

Characteristic film properties

Uniformity: +/- 1% (across 21” plate)
Transmission across 8-12 micron range: >88%

Films pass environmental and durability testing per MIL standards:

Scotch® tape adherence
Eraser abrasion
Salt-water immersion
Salt fog/spray
Cycled temperature/humidity
Sand slurry with windshield wipe

Vacuum Chamber

24-inch diameter with mechanical top-lid hoist
Turbomolecular pumping system

Process Control

Plasma-Enhanced Chemical Vapor Deposition (PECVD)
21-inch diameter substrate plate
Constant deposition rate set by plasma parameters with film thickness controlled by time
Chamber O2 cleaning process to maximize system uptime

User Interface

System functions fully automated with a standard control platform
User interface via menu-driven LabVIEW® HMI software
Standard screens for System Overview, Process Recipe Development, Data Log/Process Trending and Alarm Status
Remote system access

Utilities

Electrical power: 208/220VAC, 3ph, 60Hz, 100A
Compressed air: 80-100 psig
Cooling water: 5-6 gpm @ 15-25°C
Process gases: 15-20 psig

Dynavac DLC series applications

Commercial and military infrared devices
Corrosion resistant coatings
Wear resistant coatings
Low-friction applications

Resources

Thin Film

Diamond-Like Carbon (DLC) Thin Film Deposition Systems

Dynavac provides precise, reliable PECVD deposition systems for commercial and military infrared applications. Our systems produce films that create a hard, smooth film for hostile-environment protection across an array of optical surfaces, including germanium and silicon optics.